異丙醇蒸氣乾燥機 (IPA Marangoni Vapor Dryer) 產品說明

Modutek's IPA Vapor Dryer (MVD Series) also known as Marangoni drying gives you a very competitive alternative to your drying requirements.

One (1) single drying chamber allows for DI water rinsing and IPA Vapor Drying in one free standing unit. IPA vapor is generated inside your standard one gallon bottle so bottle change is very easy and quick. IPA bottle change is at deck level in our exhausted compartment with level sensor protection.

IPA vapor is introduced through the top cover of the drying tank allowing for even vapor distribution. This reduces your IPA consumption and still gives you surface tension drying across all wafers or substrates. Ozone can also be introduced to the drying process to eliminate trace organic impurities. We work with your engineering team to design the best IPA Vapor Dryer (Marangoni Drying) for your application. We handle all process sizes from standard wafer (one or two) carriers to glass substrates. Our SolidWorks Simulation Professional and SolidWorks. Flow Simulation give you the process flow characteristic you require. This advanced software will improve your drying time.