HiPIMS直流高壓脈衝電漿電源
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產品說明
- 6, 10, 20 KW Base units
- Voltage, Current, Power regulation
- Ultra fast ARC-Handling (V or I detect, absolute values or delta values (%))
- Voltage reversal after ARC, immediately quenches the ARC I / V reg. is adjustable -> Voltage regulation is faster, can be disabled for certain applications
- Pulsing frequencies up to 40KHz for low power units (1KHz / 2 KHz is standard ),
- Pulse durations from µs up to ms range; standard pulse is from 5µs to 1ms but can be extended to 5ms, 10ms …
- PS units can be put in series or parallel -> increase Voltage / Power / Current