HiPIMS直流高壓脈衝電漿電源

產品說明

  • 6, 10, 20 KW Base units
  • Voltage, Current, Power regulation
  • Ultra fast ARC-Handling (V or I detect, absolute values or delta values (%))
  • Voltage reversal after ARC, immediately quenches the ARC  I / V reg. is adjustable  -> Voltage regulation is faster, can be disabled for certain applications
  • Pulsing frequencies up to 40KHz for low power units (1KHz / 2 KHz is standard ),
  • Pulse durations from µs up to ms range;  standard pulse is from 5µs to 1ms but can be extended to 5ms, 10ms …
  • PS units can be put in series or parallel -> increase Voltage / Power / Current