產品說明

• Movable crucible cover, which rises before crucible is rotated
• Pneumatically driven, low-impact cover motion
• Lip of cover recessed around exposed pocket
• Raised structures on underside of cover interlock with crucible web walls
• Virtual elimination of cross-contamination
• Minimal deposition on web walls and on cover margins around exposed pocket
• Reduced risk of damage to source and turret indexer
• Removable/replaceable cover and crucible enable easy source convertibility
• Enhanced crucible cooling improves thermal stability during evaporation
• Adjustable internal and external pole piece extensions optimize beam spot control, regardless of beam position
• Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
• Power ratings: 1-10 kW (Model 2PT) and 1-12 kW (Model 3PT)