RF Plasma Generators射頻電漿電源
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RF Plasma Generators & Match 產品說明
- 100 W to 2400 W
- 13.56 MHz
- Analog/Digital, RS-232, USB interfaces
- Low Harmonic Distortion
- Automatic and Manual Gain Control
- High Speed Pulsing (Bursting) controls
- Compatible with T&C's Matching Networks
- Includes all essential RF power/communication cables and mounting brackets
- Air cooled (Air & Water 1200 W +)
- Half rack mount or stand alone versions